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Hans Pfeiffer is a physicist best known for his contribution to the development of electron beam lithography. Dr. Pfeiffer received his Ph.D. from the Technical University of Berlin, Germany in 1967 and joined IBM the following year. During his career he established a world class team and led the development of several generations of IBM's electron-beam lithography systems. He is recognized for building the industry's first ''shaped beam'' lithography systems. Dr. Pfeiffer was elected IBM Fellow in 1985. == References == *( Biography in IBM Journal of Research and Development ) *( Biography at CEI-Europe ) 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「Hans Pfeiffer」の詳細全文を読む スポンサード リンク
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